Abstract: a kind of MEMS switch micro drive based on light-induced deforming polymer is introduced.light-induced deforming polymer materials in light type micro actuator has the advantage of small volume,simple structure,easy to realize remote control,etc. According to the size and performance requirements of MEMS switch and the micro actuator model,and get the biggest driving force required.Calculated equivalent bending behavior of a certain size sheet,and apply it to the MEMS switch micro drive. Using ANSYS to make simulation analysis for micro actuator and closure mechanism,according to the results of simulation to improve the structure,and the scheme of adopting multi-layer laminated structure is determined in order to meet the biggest driving force.