电阻热效应对力式微固态测风传感器测量精度的影响

Influence of Resistor Thermal Effect in Wind Measurement Using Micro Solid State Drag Force Wind Sensor

  • 摘要: 本文就电阻热效应对基于风的拖动力原理的微型固态测风传感器测量精度的影响进行了研究。微型固态测风传感器通过溅射在悬梁上的铂电阻测量悬梁弯曲应变来获得风速信息和简单的风向信息。风吹过铂电阻时,除了应变引起电阻阻值变化外,由于热传导、对流、辐射等热效应,其阻值也会随着风速的变化而变化。当热效应引起的电阻的变化趋势和应变引起的电阻变化趋势相反时,传感器的输出先减小后增大,风速测量产生较大误差。文中对两种铂电阻在悬梁上的放置连接方式的传感器进行了理论分析,通过对利用MEMS工艺制作的两种传感器的测试,证实理论分析与实验结果相符。

     

    Abstract: The influence of resistor thermal effect in flow measurement using micro solid state drag force wind sensor is researched in this paper.The wind velocity and simply wind front or back directions are obtained by measuring the strain of cantilever of the micro solid state drag force wind sensor.The strain is measured using platinum resistor made by sputtering.When wind blows over resistor the resistance of it will vary with the wind velocity because the thermal conduction,convection and radiation between environment and resistor.The output of sensor will decrease then increase when the variation of resistance caused by thermal effect and strain are different.Thus the results of measurement will be affected.In this paper two kinds of wind sensors the connection mode of the resistor of which are different are analyzed.The testing results of two kinds of sensors which are manufactured based on MEMS processes validate the results of analysis.

     

/

返回文章
返回