Abstract: Transparent conducting thin films of F:SnO₂ have been deposited onto preheated microscopic glass slides by intermittent spray pyrolysis deposition using pentahydrate stannic chloride （SnCl₄·5H₂O） and ammonium fluoride （NH₄F） as precursors. A perfume atomizer for cosmetics use has been used for deposition. As-deposited films were characterized by XRD,SEM,UV-VIS spectrophotometer and four-point-probe setup. The influence of spray times,substrate temperature,precursor concentration,doping concentration and ethanol to water ratio on the optical and electrical properties of films above mentioned were discussed. The results show that the sheet resistance of the thin films is 13 Ω/□ and the average transmittance is 79%,when the concentration of SnCl₄·5H₂O is 0.81 mol/L,the concentration of NH₄F is 0.1 mol/L,the ethanol to water ratio is 8:2,being sprayed 100 times at 500 ℃.