纳米WO3氯化氢气体传感器
HCl gas sensor based on nano-WO3
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摘要: 以三氧化钨为基材,通过掺杂制作了半导体型氯化氢气体传感器,研究元件的气敏特性。以钨酸钠和浓盐酸为反应物,采用溶胶-凝胶法,制备出具有特殊结构的三氧化钨。通过XRD、SEM、TEM等微观分析手段,发现该材料具有层片状结构,结构松散,平均粒径约17纳米。研究发现,掺杂适量的氧化铝可以大大提高三氧化钨对氯化氢气体的灵敏度,但元件稳定性以及选择性比较差,通过掺杂少量的氧化锌,虽然降低了元件的灵敏度,却可以大大提高元件的稳定性,适当提高加热电压,可抑制元件对NO2等气体的灵敏度,提高选择性。本文对三氧化钨的气敏机理及特性进行分析。Abstract: The semi conductive HCl gas sensor based on WO3 is prepared by dopping,and the characteristic of that is studied.The special structure WO3 is produced from Na2WO3 and strong hydrochloric acid by sol-gel method.It’s found by XRD,SEM and TEM that the structure is sheet and incompact and the mean particle is about 17nm.The sensitivity to HCl can be improved greatly by dopping Al2O3 but the stability and selectivity is poor.Although the sensitivity is reduced by dopping a little ZnO,the stability can be improved greatly.The sensitivity to NO2 can be reduced by increasing the heating voltage.The sensitivity mechanism and characteristic of WO3 is analyzed.
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