Abstract: In this paper,carbon nanotube（CNT） film gas sensors were fabricated by conventional lithography,screen-printing and sintering processes on ITO transparent conductive film.And the influences of scanning voltage,operating frequency and various process parameters on the properties of gas sensors were investigated.Optical microscope tests show that the surface of screen-printing CNT film is smooth and uniform.The image of scanning electron microscopy exhibits that the organic binder on the surface of screen-printing CNT film is fully decomposed and vaporized when sintered at 300℃,and abundant gaps improving effectively gas absorption area are obtained.The analysis of semiconductor property analyzer indicates that at room temperature,the corresponding sensitivities of capacitance and conductance of the CNT film gas sensors after sintered at 300℃ in ethanol atmosphere are 199% and 197%,respectively.