Abstract: The perovskite-like SrBi₂Ta₂O₉ thin films have been successfully deposited on Pt-coated silicon substrate by pulse excimer laser deposition. The dominant orientation of SBT thin films was （008） and （115）. Polarization was reversed under 5V, and well-saturated hysteresis loop was obtained; P_r and E_c were 8.4 μC/cm² and 57 kV/cm, respectively The I-V curve of Pt/SBT/Pt showed symmetric bistable peak capacitance and dielectric constant at zero applied voltage for a capacitor with area 3.14×10⁴μm² and thickness 0.35μm were about 560pF and 600, respectively. Fatigue endurance of the Pt/SBT/Pt capacitor was excellent.