Abstract: Surface modification and bonding of PDMS（polydimethylsiloxane） is one of the key technologies in the domain of microfluidic fabrication.Three kinds of surface modification methods were analyzed and compared in this paper,and then PDMS bonding was achieved after modification by O₂ plasma produced by corona discharge in room air at atmospheric pressure.Surface treatment parameters of corona discharge were optimized and bonding strength between PDMS and PDMS,PMMA was tested.In addition,bonding strength was compared with that of other modification methods.Burst pressure（the maximum pressure） tests results demonstrated that burst pressure from the bonding modified by corona discharge at room temperature can reach up to 700KPa,which was far higher than that from other modification methods.