Ni/Au、Pd/Au与p-AlGaN材料的接触特性

Ni/Au and Pd/Au contacts to p-AlGaN

摘要: 在AlGaNpin型日盲紫外探测器结构中的p-AlGaN层上生长了Ni/Au和Pd/Au,并在600～850℃温度下进行快速热退火,测量其退火前后传输线模型中各金属接触间的电学性质。实验发现,Ni/Au与Pd/Au在p-AlGaN上表现出了不同的接触性能。为了更好的说明金属与p-AlGaN材料接触之间在退火后电流的变化,还测量了p-AlGaN材料裸片两点之间I-V曲线在退火前后的变化。实验表明,比起Ni/Au来,Pd/Au在p-AlGaN材料上制备欧姆接触具有一定的优势,并在文中进行了分析。

Abstract: Contacts to p-AlGaN layer using Ni/Au and Pd/Au are reported. The metals Ni/Au and Pd/Au deposited on p-AlGaN layer （x=0.46） were annealed from 600~850℃. The dependence of the contacts properties on annealing temperature in N₂ is examined via TLM measurements. Experiments show some different contacts properties between Ni/Au and Pd/Au on p-AlGaN. The I-V properties of bare p-AlGaN are measured to better analyze the change in I-V curves of Ni/Au and Pd/Au contacts. The results show the effectiveness of Pd/Au than Ni/Au to make the ohmic contacts to p-AlGaN.