Abstract: Accelerometer is decomposed into many functional components,each of which is modeled by using the relative movement theory and energy method,and its parameterized model coded in Verlog-A is realized.A system-level model of capacitive micromachined accelerometer composed of functional components models is designed and simulated in SABER.Simulation of modal frequency of the accelerometer agrees within 3% to the resuet of FEM analysis.The result also indicates that transient analysis of complicated electro-mechanical coupled system is accomplished quickly in this way.Simulation of Vout agrees to testing result of within 7.5%.