Abstract: Anti-powder sputter method was adopted to develop SnO₂/CeO₂ alcohol gas sensitive material.Experiment results show that the new technique can improve the stability of the gas sensitive thin film.The optimum doping range and the sensitivity thin film’ sthickness aredetermined to be 4%-32%and 100-180nm,respectively.The characteristic time τ changes with thin film thickness ^l following the rule of τ∝l².By using the SnO₂/CeO₂ thin film,a new alcohol gas microchip sensor with side-heater was developed,which has the gas sensitivity between 20 to 80and the characteristics time lessthan 15s.The gas sensor has a relatively stable testing voltage between 4.5 to 10.5V.Moreover,the sensitivity of the gas sensor is significantly reduced by the existence of humidity.