微机械加工微型葡萄糖传感器

MICROMACHINED GLUCOSE MICROSENSOR

摘要: 用微机械加工技术和微电子平面工艺制备了微型Clark型氧电极。外型尺寸为15×2×0.7mm³，敏感面积为1×0.5mm²。在敏感区固定葡萄糖氧化酶（GOD），构成了微型葡萄糖传感器。传感器的主要性能：灵敏度2.2nA/（mmol/L）；响应时间<1min，线性范围0.1~10mmol/L，变动系数9.7%，稳定响应在二十天以上。

Abstract: A miniaturized Clark oxygen sensor with 15×2×0.7 mm³ in size and 0.5×1.0mm² in sensing area was fabricated by micro-machining technique and standard planar processing. A glucose microsensor was developed by means of fixing GOD on the sensing area of the oxygen electrode. It’s sensitivity is 2.2nA/（mmol/L）, response time ＜1 min, linear range 0.1~10 mmol/L, variation coefficient 9.7%, and life time ＞ 20 days.