无氢化学气相沉积法制备碳纳米管

Synthesis of carbon nanotube by CVD method without hydrogen

摘要: 采用无氢的化学气相沉积法（CVD）进行碳纳米管的制备技术研究,并成功地制备了Φ20~Φ80nm左右,长度为50～100μm左右的碳纳米管。通过改变气体的流量等影响因素实现了定向碳纳米管薄膜和多层碳纳米管薄膜以及其它各种形态的碳纳米管的制备。采用微区Raman光谱、扫描电子显微镜（SEM）和透射电子显微镜（TEM）等方法对产物的形貌和结构进行了表征,结果表明采用无氢CVD法可以制备出多种形态的碳纳米管。

Abstract: By improved chemical vapor deposition method without hydrogen, carbon nanotubes（CNTs） were grown under N₂:C₂H₂ gas using ferrocene as a catalyst. The diameter and the length of CNTs are 20～80 nm and 50～100 μm, respectively. Aligned carbon nanotubes film and multi-layer film were prepared by chemical vapor deposition under different synthesis conditions without hydrogen. The growth behaviors and structures of CNTs were characterized by scanning electron microscopy（SEM）, transmission electron microscopy（TEM） and Raman spectroscopy. Results show that the variety shapes of CNTs can be successfully grown by CVD without hydrogen.