Abstract:
Scanning Electron-Acoustic Microscopy (SEAM) is used to investigate ferroelectric semiconductor ceramics. The linear electron acoustic amplitude images of this material were successfully obtained at different energy-modulated frequencies of electron beam. Electron acoustic signal generation mechanisms and the origins of image contrasts are discussed by analyzing the electron acoustic images obtained at different modulated frequencies At the same time,the differencies between the secondary electron image and the electron acoustic images have been shown. The SEAM has the ability in observing the subsurface defects.