铁电半导体陶瓷材料电声成像中电声信号的产生

SIGNAL GENERATION OF FERROELECTRIC SEMICONDUCTOR CERAMICS IN SCANNING ELECTRON-ACOUSTIC MICROSCOPY

  • 摘要: 本文利用扫描电声显微镜成像技术对铁电半导体陶瓷材料进行了无损成像观察和分析。通过对不同条件下获得的电声像的讨论,得出在这种材料的电声成像中,热波耦合机制和压电耦合机制对电声信号的产生均有着贡献,但热波耦合机制占主导地位。另外扫描电声显微镜在对材料的亚表面缺陷无损观察方面有着其它观察手段所无法比拟的优点。

     

    Abstract: Scanning Electron-Acoustic Microscopy (SEAM) is used to investigate ferroelectric semiconductor ceramics. The linear electron acoustic amplitude images of this material were successfully obtained at different energy-modulated frequencies of electron beam. Electron acoustic signal generation mechanisms and the origins of image contrasts are discussed by analyzing the electron acoustic images obtained at different modulated frequencies At the same time,the differencies between the secondary electron image and the electron acoustic images have been shown. The SEAM has the ability in observing the subsurface defects.

     

/

返回文章
返回