Abstract: Vanadium pentoxide(V₂O₅) thin films were deposited on quartz glass and silicon substrates by pulsed magnetron reactive sputtering technique at room termperature. The deposited films were annealed at 450℃.The surface morphology and structural features were studied by XRD, XPS, and AFM to ensure the growth of V₂O₅ films. Optical transmission and reflection characteristics were measured by spectro-scopy from 200nm to 2500nm wavelength region. The investigations reveal that V₂O₅ films have high purity, monophase and 2- order resistance change from room temperature to transition temperature. Their optical band gap(E_g) is about 2.46eV,in accordance with that of bulk V₂O₅ materials.