Abstract: The contact quality between CNTs and metal electrodes is an important factor for nano devices.Samples with CNTs assembled between a pair of Au electrodes by dielectrophoresis were respectively annealed at the temperature of 200℃,300℃ and 400℃ for an hour and then cooled naturally.By measuring I-V curves,the contact quality of samples was tested before and after annealing.The contact quality between CNTs and metal electrodes got better after annealing.Even though it became worse with time passing,it is still better than that before annealing.With annealing at 300℃ for 30min,60min,90min,experimental results showed that the contact resistance decrease with prolonging the annealing time.