Abstract: Based on the device dynamic model,virtual operation was built to show direct relation of MEMS device design parameters and operation. Static model of micropump was studied including membrane and micropump.By identifying groups of data from finite element analysis,the static model of membrane is established.Then,analytical expression of microvalve deformation shape with design parameters is derived.Based on the static model,the dynamics of micropump operation are obtained from the inadequate physical experiment data by analyzing the operation mechanism.Micropump virtual operation is implemented in virtual environment,and it has fairly high accuracy by being compared with the experiment results.