纳米技术时代的高端硅基材料-SOI,sSOI和GOI

SOI,sSOI and GOI——advanced silicon-based materials for the nanotechnology era

摘要: 本文综述了纳米时代的高端硅基材料-SOI,sSOI和GOI,并结合介绍了上海微系统所和上海新傲科技有限公司相关的研究工作。

Abstract: Advanced Silicon-based materials —— SOI,sSOI and GOI for the nanotechnology era was reviewed.The status of R＆D on advanced Silicon-based materials in Shanghai Institute of Microsystem and Information Technology and Shanghai SIMGUI Technology Co.,Ltd are reported.