Pt浓度对磁控溅射制备Co<sub>1-x</sub>Pt<sub>x</sub>:C薄膜的影响

Pt浓度对磁控溅射制备Co_1-xPt_x:C薄膜的影响

摘要: 采用组合靶,利用磁控共溅射技术制备了Co_1-xPt_x:C复合纳米颗粒薄膜,研究发现CoPt粒子取向和磁性能与CoPt:C薄膜中的Pt浓度有密切关系,在较高Pt浓度的CoPt:C薄膜中观察到垂直各向异性现象。通过改变Pt浓度,可以获得粒子粒径小于10nm、矫顽力可控、高的垂直磁晶各向异性能的薄膜。综合考虑,薄膜的最佳成分为Co₄₇Pt₅₃:C,此时矫顽力达到最大。

Abstract: The nanocomposite CoPt:C films with different Pt concentrations were fabricated by magnetron cosputtering and subsequent annealing. It’s found that orientations of CoPt grain and magnetic properties are related closely to the Pt concentrations. The CoPt:C films with high Pt concentrations have perpen- dicular anisotropy. Changing Pt concentrations, the films with grain size less than 10 nm, adjustable coercivity and strong perpendicular magnetic anisotropy are achieved. The maximum coercivity is ob- tained for the film with optimum composition （Co₄₇Pt₅₃:C）.