Abstract: The ideas about the development and prospect of Micro Electro Mechanical Systems (MEMS) have been advanced. After considering the peculiaries of micromachining technology and MEMS, the needs for successful development of MEMS have been suggested on the basis of utilizing its peculiaries and avoiding its weakness. Five kinds of MEMS devices to meet the above mentioned suggestion have been described. The international future trends and domestic development of MEMS are discussed.