梯度复合KTN薄膜的铁电和热释电性能研究
Ferroelectric and pyroelectric properties of gradient composite KTa1-xNbxO3 thin film
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摘要: 在Pt/Ti/SiO2/Si基片上采用Sol-Gel法制备了五组分成分梯度分布的KTa1-xNbxO3(x=0.55,0.525,0.50,0.425,040)热释电薄膜。测试结果表明,复合KTN薄膜具有钙钛矿型结构,0.5μmKTN薄膜在15℃至51℃温度范围内,频率1.0kHz时,平均相对介电常数εr=1075,平均介电损耗tanδ=0.011。在室温及120kV/cm下极化30m in后,0.5μμm复合薄膜在15-51℃温度范围内热释电系数出现峰值,平均热释电系数为3.54×10-6C/(cm2·K),电压响应优值Fv=1.205×10-9C·cm/J,探测度优值Fd=3.768×1-7C·cm/J。该薄膜工作温度范围较宽,作为热释电材料开发应用前景十分广阔。Abstract: Thin films of gradient multicomposition composite KTa1-xNbxO3（x=0.55,0.525,0.50,0.425,0.40） were prepared by sol-gel method on the Pt/Ti/SiO2/Si substrates.The relative permittivity and dielectric loss of the composite KTN films are 1075 and 0.011 at 1.0 kHz in the temperature range from 15℃ to 51℃ respectively.After polarizing in a field intensity of 120kV/cm at room temperature,the composite thin films KTN 0.5μm thick exhibit an excellent pyroelectric behavior with an average pyroelectric coefficient of 3.54×10-6C/（cm-2·K） and optimal values of voltage response and detectivity of 1.205×10-9C·cm/J and 3.768×10-7C·cm/J respectively.The result shows that the thin films are excellent pyroelectric material.
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