Abstract: TiO₂ thin films were prepared by DC reactive magnetron sputtering. The microstructure, surface morphology and the absorption spectrum of the films were tested by X-ray diffraction, AFM and UV-3150 spectrophotometer. The photoconductive UV detector based on anatase TiO₂ thin films is of C/ TiO₂/ITO structure, and its photoresponse was investigated. The preliminary results show that the photocurrent of TiO₂ thin films rises to 2.1mA, which is stable under 10min irradiation. That means TiO₂ thin films is sensitive to UV light and its photoresponse is stable. It indicates that TiO₂ thin films are useful material for UV detector.