Abstract: In this paper,the analytical principles,applications,advantages and limitations of the test methods for the tracing oxygen content in high purity gases,such as Colorimetry,Phosphor chemiluminescence method,Galvanic method,Concentration cell method,Fiber Optic method,Gas Chromatography etc.,are briefly introduced.The application status and progress of zirconia that in analysis of trace oxygen are reviewed in details.Besides,this paper also points out some problems existed in the Zirconia Trace Oxygen Analyzer and make forecast for the development in future.