压电驱动器环形压电振子特性及其等效电学参数识别

Characteristics Analysis and Electrical Parameters Identification of the Rotary Piezoelectric Vibrator of the Ultrasonic Actuator

摘要: 压电驱动器是一种由压电功能材料构成的微型机电器件,为研究改善压电驱动器环形压电振子的振动特性和俘能特性,建立了压电振子的机电耦合有限元模型,分析了压电振子齿槽倾斜度和支撑对其振动特性和俘能特性的影响,并从改善振子振动特性和俘能特性角度出发,对压电振子进行了结构优化设计;其次,利用该有限元模型求解了压电振子的导纳特性曲线,基于导纳特性曲线对压电振子进行了电学参数识别。研究结果有利于压电驱动器的结构优化、驱动控制和阻抗匹配的设计。

Abstract: In order to analyze the vibrating and the harvesting performances of the rotary vibrator of the ultrasonic actuator.An electro-mechanical coupling finite element（FEM） model of the piezoelectric vibrator of the ultrasonic actuator is derived.Based on the model,the influences of the configuration parameters（such as the slot slope and the support of the piezoelectric vibrator） on the dynamic characteristics（including the vibrating characteristics and the harvesting characteristics） are studied,and the optimized configuration parameters of the vibrator are defined.Then the admittance characteristic and the corresponding electrical parameters of the piezoelectric vibrator are obtained by the FEM Model.All the results are contributed to the design of the structure and the controller of the ultrasonic actuator.