Abstract: In this paper,a PZT/Si composite transducer for resonant ultrasound spectroscope（RUS） measurement is proposed and designed.This composite transducer is made of a PZT piezoelectric disk,where a tiny silicon piece is adhered in its centre.For the silicon piece,a pyramid pit is fabricated by using MEMS technology.By using this composite transducer with a central pyramid pit,the tested sample is easily amounted to RUS stage and measurement accuracy can be improved.In the paper,we use finite element method in ANSYS to analyze the performance of composite transducer,and compare it with that of single PZT plate piezoelectric transducer.The results show that the sensitivity of composite transducer decreases only by 4%~4.8% and can be used in RUS measurement.