Abstract: Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage. In this paper, we, three institutions, reviewed our achievements on micromachining technologies within the recent years. The first-developed technologies, including the self-aligned quasi three dimensional fabrication technology, Si three dimensional maskless etching technology and Si/Si low temperature direct bonding technology were mainly introduced. Some other developed technologies and fabricated micromachined devices together with its parameters were also presented.