VInH4在InP材料中的影响

Influences of hydrogen vacancy complex VInH4 in N-Type LEC InP

  • 摘要: 在未掺杂和掺Fe的LEC-In中用FT-IR测试到VInH4 的存在。已经证实该缺陷在LEC-InP中普遍存在。经研究表明在掺Fe的InP中的VInH4 浓度比在未掺杂中的高。而在同一晶锭中其浓度分布是头部高, 尾部低。讨论了其对未掺杂InP的电子特性和掺Fe的InP的补偿的影响, 及其对InP热稳定性的影响。

     

    Abstract: A hydrogen indium-vacancy comples VInH4 in undoped and Fe-doped liquid encapsulated Czochralski (LEC) InP is measured by infrared absorption spectroscopy. This complex is found to be a common defect in as-grown LEC InP. The concentration of VInH4 in Fe-doped InP is higher than that of undoped InP. The concentration of VInH4 is high in wafers from the top of an ingot and low from the tail of an ingot. The influence of this complex on the electrical properties of n-type LEC undoped and compensation in Fe-doped InP is discussed. The results reveal the influence of VInH4 on the thermal stability of InP materials due to the fact that bond of hydrogen complex is weak and dissociates easily upon annealing.

     

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