Abstract: Micropump used as actuator of microfluid device is an important part of micro-electro-mechanical systems (MEMS). The micropump was simulated as whole to optimize the work condition.Simulation results were presented for the flow rate versus frequency and the efficiency versus frequency. The simulation results show that the micropump has a maximum flow rate at 4-5 Hz, if the input power is greater than 2 W the flow rate does not increase markedly, the micropump show the highest efficiency 32.54 μl/min·W at 1 W as input power and 5 Hz as input frequency.