Abstract: BiFeO₃ film were prepared by sol-gel process. X-ray diffraction pattern indicates that the sample is random oriented. Scanning electron microscopy confirms that the film has a polycrystalline structure and there is no diffusion between the film and bottom electrode. Ferroelectric measurement shows that the remnant polarization of the film is 2.0μ C/cm², which is comparable to the single crystal at low temperature. A diffused dielectric transition is identified which is attributed to the presence of Bi₄₆Fe₂O₇₂ phase.