纳米压印研究进展及创新应用

Research Progress and New Applications of Nanoimprint

  • 摘要: 纳米压印(Nanoimprint Lithography, NIL)作为一种高分辨率、低成本的微纳结构大面积图形化复制技术,近年来在光学、生物等多个领域展现出广泛应用潜力。本文总结了纳米压印技术的发展历程与技术分类,并重点探讨其在微纳光学器件及生物传感领域中的新兴应用。目前,纳米压印已经成为制备增强现实眼镜用亚波长光栅、微透镜阵列、中红外器件等微纳光学器件的重要量产级图形化工具;在生物检测中,以纳米压印制备的纳米光学结构可通过增强光学信号等方式实现对生物分子检测灵敏度的提升。纳米压印作为与传统光刻技术并行的图形化技术,将越来越多地在半导体器件、光学器件、生物分子检测系统量产中展现其高精度、高通量、低成本的纳米级制造优势。

     

    Abstract: In recent years, Nanoimprint Lithography (NIL) has shown broad application potential in optics, biology, and other fields. As a high-resolution and low-cost technique for large-area micro/nanostructure patterning, it provides a valuable tool for microfabrication. This paper summarizes NIL’s development history and technical classification, with a focus on its emerging uses in micro/nano-optical devices and biosensing. Currently, NIL serves as a key mass-production tool for micro/nano-optical devices, including AR subwavelength waveguides, microlens arrays and mid-infrared devices. In biodetection, nano-optical structures fabricated via NIL can enhance signals, thereby boosting the detection sensitivity of biomolecules. As a counterpart to traditional lithography, NIL will increasingly excel in the high-precision, high-throughput and low-cost mass production of semiconductors, optical devices and biomolecular detection systems.

     

/

返回文章
返回