Abstract: In this work,the CdTe thin films have been treated by CdCl₂ after being deposited by close-space sublimation（CSS）.The films were investigated by X-ray diffraction（XRD）,scanning electron microscopy（SEM）,UV/Vis and the relationship of dark conductivities temperature（σ^T）.The results indicate that（111） preferred direction of crystalline grains still exists after annealing;the treatment with CdCl₂ can passivate recombination sites on grain boundaries,promote recrystallization and grain growth;The dark conductivities（σ_dark） increase,and the conductivity activation energy（Ea） decreases with the annealing temperatures increasing.As a result,an optimization anneal condition has been achieved.