Abstract: Ag⁺ was implanted into titanium dioxide films that synthesized by reactive magnetron sputtering method.The investigation results show that main phases in the film are TiO₂ and Ag,and Ag nano particles can be found.The depth profile distribution of Ag closes to Gauss Distribution,and its peak moves to the surface of the film with the increase of Ag doped dose.After Ag implantation,rough surface with bulky islands are observed instead of originally flat and dense surface,and the root mean squared（RMS）roughness of the film increases with implantation dose.However,different implantation dose has no significant influence on the surface energy of the films.