Abstract: The fabrication of microchip of Capillary Electrophoresis based on SU8 and PMMA was developed in this paper.The fabrication process of SU8 micro-channel was studied,the fabrication of micro-electrodes affected by material properties of PMMA was also discussed.The microchip was packaged by thermal-pressure bonding method.The results indicate that high quality of CE microchip was fast fabricated by this new method,which also provides the foundation for the research of UV-LIGA of CE microchips.