双轴微磁通门传感器
Two-axis micro fluxgate sensor
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摘要: 设计和制作了一种双轴微磁通门传感器。这种微型传感器为螺线管型,磁芯设计为矩形环状闭合结构,磁芯每条边上均绕有激励线圈和检测线圈,保证传感器能够同时检测X轴和Y轴两个方向上的弱磁场。采用了MEMS技术制作微型传感器,其中磁芯用电镀的方法获得,材料为Ni0.8Fe0.2坡莫合金,厚度5μm。制作出的微型传感器的尺寸为7×7mm2,单元内部最小线宽为50μm。检测了线圈的电气导通性,测得电阻值为110欧姆。该微型传感器能够检测弱磁场,因此可用于航天、医学和军事等领域。Abstract: A type of two-axis micro fluxgate sensor has been designed and fabricated.In order to measure X-and Y-axis weak magnetic fields at the same times,the magnetic core was designed to be square-ring shape which was twist with excitation and pick-up coils.The micro sensor was fabricated by MEMS technique,and 5μm thick Ni0.8Fe0.2(permalloy) film was micro-electroplated as magnetic core for the sensor.The size of the sensor is 7×7mm2 with the 50μm width coil.The result shows that the sensor can be used to measure weak magnetic field.Therefore,it will be useful in various application such as military,medical,and space research.
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