Abstract: TiO₂ nanoparticles were obtained with li quid phasedeposition method at low-temperature.Effects of reaction temperature,H₃ BO₃/TiF₆^2- molar ratio,deposition time and,TiF₆^2- concentration on the properties of TiO₂ nanoparticles were studied.Photocatalytic activity of the nanopartic les was evaluated by degradation of methylo range.The resultsindicate that the photocatalytic activity of TiO₂ nanoparticles reaches the best as re action temperature is 90℃,H₃ BO₃/TiF₆^2- molar ratio is 1:2.5,deposition last 1hour and adding of water is 320ml.