Abstract: Anew silicon capacitive accelerometer with force balance technology is proposed. The micromachining technology is suggested to fabricate the accelerometer. Based on the principle of electrostatic levitation, the seismic mass is levitated and feels the acceleration. A related circuit which can be integrated around the sensor is simulated. After analysis of the characteristics of its levitation, stability, dynamics and the related circuit, it is found that the sensitive element is very rigid and its sensitivity is about 40kHz/g.