ZnO宽带隙半导体及其基本特性

Recent advances in characteristics of ZnO semiconductor

  • 摘要: ZnO半导体是宽带隙半导体领域中继GaN和SiC之后的研究热点。同时,作为一种氧化物半导体,ZnO半导体在能带结构、晶格缺陷、抗辐照特性以及电学性质等方面具有特殊性,已有的研究中还存在一些不同的认识。本工作在阐述ZnO的晶体结构和基本性质基础之上,对其能带结构和缺陷特征、电子输运以及p型掺杂等主要的半导体特性研究现状进行了较为全面综述和分析。由于ZnO半导体具有高的激子束缚能、优良的电子输运性质、强抗辐照特性以及低成本和环境友好等显著特征,它是未来半导体光电子领域极具应用潜力的新一代宽带隙半导体材料,但是到目前为止,p型掺杂技术仍然是ZnO半导体器件面临的最大挑战。

     

    Abstract: Wurtzite ZnO,a wide-bandgap(3.437 eV at 2 K) semiconductor,has recently become a new research focus in the field of the wide-band gap semiconductors.It should be noted that ZnO also belongs to the oxide semiconductor which introduces some different characteristics for ZnO semiconductor from others such as GaN and SiC.The energy band structure,crystal defects,electronic transport property,p-type doping,etc.were studied as well as the fabrication and application of ZnO semiconductor.Some progress has been made and some issues still exist.Recent successes in the research of the characteristics of ZnO semiconductor was over viewed and discussed.The main advantages of ZnO are its large exciton binding energy(60 meV),its high field transmission properties and the environment-friendly growth processes for bulk and epitaxial ZnO crystal,which promises it's potential applicatioins in the future electronic and opto-electronic fields.Up to now,its still an issue how to obtain reproducible high-quality p-type ZnO semiconductor.

     

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