Abstract: Using DC magnetron sputtering equipment to prepare ZnO/Al composite amorphous silicon cell back electrode,in the actual production line compared the parameters of amorphous silicon cell which used ZnO/Al back electrode and Al back electrode,the experiment proved that ZnO/Al composite back electrode can improve the short circuit current of solar battery and the maximum power,and by extending the experiment to verify the use of ZnO/Al composite back electrode cell stability is good,and suitable for large-scale production of amorphous silicon.