MEMS微梁疲劳频率特性测试与分析

Test and analyse on a frequency characteristic of a micro beam of MEMS

    摘要
  • 摘要: 多晶硅双端固支梁是MEMS器件中最常用的组件之一,它的疲劳特性直接关系到器件的寿命及安全性.本文针对多晶硅微梁结构进行疲劳可靠性测试,在对其施加循环静电激励后,测试了它的频率变化特性.并分析了频率向高频移动的原因,从而说明了梁的疲劳特性.

     

    Abstract: Polysilicon beam is a basic part in MEMS,and its fatigue property influences the life and reliability of device directly.In this study,a fatigue test is done to the Polysilicon beam.After the high-cycle electrostatic is actuated on the beam,the change of the resonance frequency is obsevered,and the reason is analysed,so the fatigue peoperty is better explained.

     

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