Abstract: A new type of silicon micro-mechanical vibratory angular rate sensor with electrostatic driving and capacitance detection was presented.The structure and principle of the angular rate sensor was discussed.The prototype was fabricated.The fabrication method,driving and detecting circuit as well as the results of the experiment were introduced.A primary test result shows that the scale factor of prototype is 3.2mV /（°·s^-1）,the scale is ±500°/s,and the linearity is 1%.