Abstract: A fabrication process of self-aligned vertical offset comb structure using plastic deformation is investigated.It mainly includes the following content: accomplish insulation between the movable comb electrode and the fixed comb electrode using a non-SOI wafer,accomplish precise self-aligning between the movable comb and the fixed comb through the stage by KOH anisotropic etching,accomplish vertical offset between the movable comb and the fixed comb using plastic deformation,and fabricate the electrode pad using a silicon wafer as mask after releasing structure.Finally,with the process,a vertical offset comb actuator is fabricated successfully.