Abstract: In this paper,an electrostatic force based digital microfluidic chip was designed and fabricated. Optimization of the chip structure by employing silicon wafer substrate,TiW/Au electrodes,thin silicon nitride dielectric layer and fluorocarbon polymer hydrophobic layer decreases the driving voltage dramatically. Deionized water droplets were successfully transported in two-dimension on this chip under only 30V with transported velocity of 96mm/s. 0.9% of sodium chloride mass fraction solution droplets were also successfully transported on this chip. Further investigation confirmed that electrostatic force is the driving force of the droplets.