Abstract: Uniform mixing of biological samples is important for quantitative detection. QCM （Quartz Crystal Microbalance） supports excellent ultrasonic ability for its amplitude resonance. An effective microchip based on QCM and SU-8 for solution mixing was reported in this paper.. The SU-8 main chip with controllable size,smooth surface and total binding,which was finally integrated with PDMS elastomer,was fabricated by improved MEMS technology,such as double-side exposure,pre-supporting of QCM and long time hard bake at 120℃. The mixing ability of this chip was characterized by Rhodamine B and SiO₂ nano-spheres. This paper will contribute to fabrication of mixing chips which are small size,convenient to be used,effective and easy to be integrated with other functional microchips.