Abstract: It is very attractive to grow electro-optical thin film on quartz substrate.In this paper, utilizing sputtering deposition and annealed in Pb₃O₄ atmosphere, Lead lanthanum zirconate titanate（PLZT 8/65/35） thin films were prepared on indium tin oxides（ITO）/quartz substrates.Results show that under the optimized conditions, the PLZT film is preferably（110） oriented and RMS roughness is as low as 3.1 nm.In the range of visible light, the average transmittance is 81.3%, the extinction coefficient is 0.003.The superior optical properties will be promising for integrated optical and photoelectric devices.