微型夹钳的最新研究

New aspects in microgrippers

  • 摘要: 微型夹钳技术是微机电系统研究的重要内容,应用于微装配等领域,在微机电系统的研究及微型产品的研制开发中发挥着重要的作用。本文选取微型夹钳技术最新研究中有代表性的成果进行了回顾,对微型夹钳的结构材料、制作工艺和工作原理等进行了分析,介绍了微型夹钳的最新研究进展,概括了研究特点及发展趋势。

     

    Abstract: Microgripper plays an important role indeveloping microelectromechanical systems(MEMS),as well as in microassembly for building uphybrid microsystems.Newly developed devices and systems of microgrippers are reviewed.The material of construction,fabrication methods and work principles are analyzed.The new aspects of microgrippers are summarized and the developing trends are outlined.

     

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