Abstract: A measurement method based on laser scanning and optical imaging technology was designed to realize the testing of the deflection angle performance of 1D torsion micro mirror.In this method a laser light was adopted as dot light source,and two coordinates of imaging dots of dot light source respectively under stillness and operation state of micro mirror can be obtained by use of the optical scanning characteristic of micro mirror itself and the memory effect of human eyes,and accordingly the magnitude of deflection angle of micro mirror under a certain driving voltage can be calculated.The error analysis shows that the average measurement error of this method is ±0.043 degree and the precision is 1%.It is also shown that the experimental result is consistent with the referenced one.The method gets rid of the dependence on microscope,interferometry,imaging CCD and other precision complicated instrument,which can be easily realized and has high accuracy,which can provide reliable gist for applications of micro mirror.