Abstract:
In this paper, we report the carrier concentration reducing of unintentionally doped InGaAsSb and the MBE growth and characterization of Te-doped n-type GaSb and InGaAsSb. By improving of MBE growth procedure, the background hole concentrations of GaSb and InGaAsSb have been decreased to 1.1×10
16cm-3 and 4×10
16cm-3, respectively. The ambient hole mobility are 940cm
2/v.s and 260 cm
2/v.s, respectively. Using Te as the n-type dopant, we obtain the high quality epitaxial layers of GaSb and InGaAsSb with carrier concentration ranging from 10
16cm-3 to 10
16cm-3. Using these materials, we have processed ambient InGaAsSb photodetector (D
λ*=4×10
10cmHz
1/2/W) and AlGaAsSb/InGaAsSb pulsed double heterostructure laser device (DHLD).