n型GaSb、InGaAsSb的MBE生长和特性研究

MBE GROWTH AND CHARACTERIZATION OF N-TYPE GaSb AND InGaAsSb

  • 摘要: 本文报导了非故意掺杂InGaAsSb本底浓度的降低和掺Ten型GaSb和InGaAsSb的MBE生长与特性的研究结果。结果表明,通过生长工艺的优化,GaSb和InGaAsSb的背景空穴浓度可分别降至1.1×1016cm-3和4×1016cm-3,室温空穴迁移率分别为940cm2/v.s和260cm2/v.s。用Te作n型掺杂剂,可获得载流子浓度在1016~1018cm-3的优质GaSb和InGaAsSb外延层,所研制的材料已成功地制备出Dλ*=4×1010cmHz1/2/W的室温InGaAsSb红外探测器和室温脉冲AlGaAsSb/InGaAsSb双异质结激光器。

     

    Abstract: In this paper, we report the carrier concentration reducing of unintentionally doped InGaAsSb and the MBE growth and characterization of Te-doped n-type GaSb and InGaAsSb. By improving of MBE growth procedure, the background hole concentrations of GaSb and InGaAsSb have been decreased to 1.1×1016cm-3 and 4×1016cm-3, respectively. The ambient hole mobility are 940cm2/v.s and 260 cm2/v.s, respectively. Using Te as the n-type dopant, we obtain the high quality epitaxial layers of GaSb and InGaAsSb with carrier concentration ranging from 1016cm-3 to 1016cm-3. Using these materials, we have processed ambient InGaAsSb photodetector (Dλ*=4×1010cmHz1/2/W) and AlGaAsSb/InGaAsSb pulsed double heterostructure laser device (DHLD).

     

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