喷雾热分解法制备MgO薄膜的研究

SPRAY PYROLYSIS APPROACH FOR PREPARING MgO THIN FILMS

摘要: 用简单的压缩空气式喷雾热分解法以醋酸镁为原料在Si（100）衬底上成功地制备了（100）取向的MgO薄膜。结果表明，为获得（100）取向的MgO薄膜，衬底温度和喷雾速率是关键因素。控制实验条件，在600⁰C得到了（100）取向的MgO薄膜。同时，用X射线衍射（XRD）、原子力显微镜（AFM）和透射电镜（TEM）对薄膜的微观结构进行了分析。

Abstract: oriented MgO thin films have been successfully prepared on Si substrate by a simple spray pyrolysis method started from magnesium acetate. The results indicated that substrate temperature and deposition rate are key factors to grow MgO films and （100）-oriented MgO films which were obtained when the substrate temperature and the flow rate of O₂ was 600⁰C and 2.5L/min, respectively. In addition, the microstructure of the MgO thin films were examined with X-ray diffraction （XRD）, transmission electron microscopy （TEM） and atomic force microscopy （AFM）.