SOI器件中浮体效应的研究进展
Development of floating body effect in SOI MOSFET's
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摘要: SOI(Silicon On Insulator)器件中氧化埋层的隔离作用带来的浮体效应,将显著地影响器件的性能。本文阐述了浮体效应产生的原因以及它对SOI器件和电路的影响,并从体接触和工艺角度两个方面介绍了目前国际上比较优异的抑制浮体效应的几种典型器件结构。Abstract: Because of the buried oxide in the silicon-on-insulator(SOI)MOSFET, it is inevitable to introduce floating body effect(FBE). This effect may cause substantial influences in the SOI device and circuit performance. In this paper, the reasons of FBE are explained, and the influences of FBE on SOI device are also discussed. Several outstanding structures and processes for suppressing the FBE are introduced.
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