Abstract: The material characteristic of the electroplating Nickel of OGA has the direct relation with the parameter of LIGA.The stretching experiment of OGA Ni is carried out with MEMS tensile test machine. The stress-strain diagram is obtained.By the data processing and analyzing,the material characteristic of LIGA Ni,such as young’s modulus,yield limit and breaking limit are obtained.These material characteristic are compared with those material characteristic measured by Nanoindenter.Both are good consistency.