利用纳米ZnO粉制备厚膜气敏传感器的研究
Study on thick film gas sensors fabricated by using ZnO nanopowder
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摘要: 以ZnO纳米粉(平均粒径30nm)为原料,利用水热热压方法制备了ZnO多孔纳米固体,同时用通常的水热法对ZnO纳米粉进行了预处理(预处理ZnO纳米粉)。然后,分别以ZnO多孔纳米固体和预处理ZnO纳米粉为原料,制备了厚膜气敏传感器。本征电阻的测试结果表明,这两种厚膜气敏传感器的本征电阻比用未经处理的ZnO纳米粉(以下简称“原料ZnO纳米粉”)制备的厚膜气敏传感器大大降低并很快达到稳定状态。有效地改善了器件工作的稳定性。结合对三种传感器的显微结构分析,对出现上述差异的原因进行了讨论。Abstract: Novel bulk ZnO porous nanosolids were prepared by Hydrothermal Hot-Press (HHP) tech- nique, using ZnO nanoparticles (with average particle size of 30 nm). At the same time, ZnO nano- particles were treated with conventional hydrothermal method (pretreated ZnO nanoparticles). then,two kinds of thick-film gas sensors were prepared by using ZnO porous nanosolid and pretreated ZnO nano- particles, respectively. The intrinsic resistances of the gas sensors were tested. Compared with the sensor fabricated by ZnO nanoparticles, the intrinsic resistances of the above two kinds of gas sensors decrease greatly. It’s good for improving the stability of the sensors. The differences in the intrinsic resistances of the thick-film gas sensors are analyzed based on the SEM and TEM measurements.
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